Die Ebenheit von optischen Planflächen bis zum Durchmesser von 300 mm wird standardmäßig mit einem kalibrierten Fizeau-Interferometer gemessen.
Die Messunsicherheit beträgt dabei 5,5 nm ( bzw.als erweiterte Messunsicherheit nach GUM 11 nm ).
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www.ptb.deThe flatness of optical surfaces with diameters of up to 300 mm is normally measured by means of a calibrated Fizeau interferometer.
The associated measurement uncertainty amounts to 5.5 nm ( or, as expanded uncertainty according to GUM, to 11 nm )
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www.ptb.deZuverlässigkeit des Qualitätssystems
Angabe der Messergebnisse und Messunsicherheit
www.ch.endress.coma reliable quality system
reporting the results and the uncertainty of measurements
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