interferometrische MEMS-Kammantriebssensoren ( MechProNO )
Silizium-Mikrotaster für schnelle Rauheitsmessungen in kleinen Bohrungen
Lupo-Taster für Rauheitsmessungen mit kleiner Antastkraft (F < 50 µN)
www.ptb.deinterferometric MEMS comb-drive sensors ( MechProNO )
Silicon microprobe for fast roughness measurements inside of micro holes
Lupo-probe for roughness measurements with small probing force (F < 50 µN)
www.ptb.de18.12.2008
Schnurrende Motoren dank exzellenter Messtechnik Weltweit erster Mikrotaster für dreidimensionale Strukturen unterhalb von zehntel Millimetern entwickelt – fruchtbare Kooperation von PTB und Industrie
16.12.2008
www.ptb.de18.12.2008
Purring motors thanks to first class measurement technology Wordwide first microsensor for three-dimensional structures smaller than one tenth of a millimeter – Cooperation of PTB and industry
16.12.2008
www.ptb.deBei bisherigen kommerziellen Systemen sind die Antastelemente relativ teuer.
Der 3D-Mikrotaster aus der PTB zeichnet sich durch seine annähernd isotrope Steifi gkeit aus.
www.ptb.deThe probing elements used in previous commercial systems were relatively expensive.
PTB s 3D micro-probe is characterized by its nearly isotropic stiffness.
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